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Items where Author is "Pourtois, G"

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Delabie, A, Pourtois, G, Caymax, M, De Gendt, S, Ragnarsson, LA, Heyns, M, Fedorenko, Y, Swerts, J and Maes, JW (2007) Atomic layer deposition of hafnium silicate gate dielectric layers Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 25 (4). pp. 1302-1308.

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