University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Techniques for generating three dimensional structures

England, et al. (2015) Techniques for generating three dimensional structures 8,937,019.

Full text not available from this repository.


Techniques for forming a three dimensional (3D) feature on a substrate are disclosed. In one exemplary embodiment, the technique may be realized as a method comprising: forming a resist structure on the substrate, the resist structure having a first resist portion with a first thickness, a second resist portion with a second thickness, and a third resist portion with a third thickness, where the first thickness may be less than the second thickness, and where the second thickness may be less than the third thickness; implanting charged particles into the substrate through the first and second resist portions and forming an implanted region in the substrate; and etching the substrate to form the 3D feature on the substrate.

Item Type: Patent
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering
Authors :
Martin, Patrick M.
Cox, David
Date : 20 January 2015
DOI : 8,937,019
Depositing User : Clive Harris
Date Deposited : 26 May 2017 12:45
Last Modified : 16 Jan 2019 18:52

Actions (login required)

View Item View Item


Downloads per month over past year

Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800