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Particle beam assisted modification of thin film materials

England , et al. (2011) Particle beam assisted modification of thin film materials 8,003,498.

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Several examples of a method for processing a substrate are disclosed. In a particular embodiment, the method may include: introducing a plurality of first particles to a first region of the substrate so as to form at least one crystal having a grain boundary in the first region without forming another crystal in a second region, the second region adjacent to the first region; and extending the grain boundary of the at least one crystal formed in the first region to the second region after stopping the introducing the plurality of first particles.

Item Type: Patent
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering
Authors :
Sinclair, Frank
Koo, John
Dorai, Rajesh
Godet, Ludovic
Date : 23 August 2011
DOI : 8,003,498
Depositing User : Clive Harris
Date Deposited : 26 May 2017 12:18
Last Modified : 16 Jan 2019 18:52

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