Integrating functional ceramics into microsystems
Tools
Dorey, RA, Rocks, SA, Dauchy, F, Wang, D, Bortolani, F and Hugo, E (2008) Integrating functional ceramics into microsystems JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 28 (7). pp. 1397-1403.
Full text not available from this repository.Item Type: | Article | |||||||||||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Divisions : | Surrey research (other units) | |||||||||||||||||||||
Authors : |
|
|||||||||||||||||||||
Date : | 1 January 2008 | |||||||||||||||||||||
DOI : | 10.1016/j.jeurceramsoc.2007.12.003 | |||||||||||||||||||||
Uncontrolled Keywords : | Science & Technology, Technology, Materials Science, Ceramics, Materials Science, MATERIALS SCIENCE, CERAMICS, films, shaping, sol-gel processes, PZT, functional applications, COMPOSITE THICK-FILMS, DIRECT-WRITE FABRICATION, PIEZOELECTRIC PROPERTIES, PZT CERAMICS, SILICON, SYSTEMS, MEMS | |||||||||||||||||||||
Related URLs : | ||||||||||||||||||||||
Depositing User : | Symplectic Elements | |||||||||||||||||||||
Date Deposited : | 17 May 2017 13:11 | |||||||||||||||||||||
Last Modified : | 24 Jan 2020 23:35 | |||||||||||||||||||||
URI: | http://epubs.surrey.ac.uk/id/eprint/838306 |
Actions (login required)
![]() |
View Item |
Downloads
Downloads per month over past year