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Lattice locations of erbium implants in silicon

Tang, YS, Zhang, J, Heasman, KC and Sealy, BJ (1989) Lattice locations of erbium implants in silicon Solid State Communications, 72 (10). pp. 991-993.

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The lattice locations of erbium implanted in silicon were studied by backscattering angular scanning in combination with photoluminescence measurements. The results show that the positions of erbium implants depend on annealing conditions and have tetrahedral and/or orthorhombic symmetries in different cases. © 1989.

Item Type: Article
Divisions : Surrey research (other units)
Authors :
Tang, YS
Zhang, J
Sealy, BJ
Date : 1 January 1989
DOI : 10.1016/0038-1098(89)90614-5
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 12:41
Last Modified : 24 Jan 2020 22:40

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