Implantation of silicon using the boron cluster BF2
Tools
Tools
Tools
Smith, R, Harrison, M and Webb, R (1999) Implantation of silicon using the boron cluster BF2 THIN SOLID FILMS, 343. pp. 602-604.
Full text not available from this repository.| Item Type: | Article | ||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Divisions : | Surrey research (other units) | ||||||||||||
| Authors : |
|
||||||||||||
| Date : | 1 April 1999 | ||||||||||||
| DOI : | 10.1016/S0040-6090(98)01714-3 | ||||||||||||
| Uncontrolled Keywords : | Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Materials Science, Coatings & Films, Physics, Applied, Physics, Condensed Matter, Materials Science, Physics, MATERIALS SCIENCE, COATINGS & FILMS, MATERIALS SCIENCE, MULTIDISCIPLINARY, PHYSICS, APPLIED, PHYSICS, CONDENSED MATTER, cluster beams, ion implantation, molecular dynamics, MOLECULAR-DYNAMICS | ||||||||||||
| Related URLs : | |||||||||||||
| Depositing User : | Symplectic Elements | ||||||||||||
| Date Deposited : | 17 May 2017 12:18 | ||||||||||||
| Last Modified : | 24 Jan 2020 22:02 | ||||||||||||
| URI: | http://epubs.surrey.ac.uk/id/eprint/834803 |
Actions (login required)
 |
View Item |
Downloads
Downloads per month over past year