A study of the effects of nitrogen incorporation and annealing on the properties of hydrogenated amorphous carbon films
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Khan, RUA, Burden, AP, Silva, SRP, Shannon, JM and Sealy, BJ (1999) A study of the effects of nitrogen incorporation and annealing on the properties of hydrogenated amorphous carbon films In: Symposium K on Carbon-Based Materials for Microelectronics of the European-Materials-Research-Society-Meeting, 1998-06-16 - 1998-06-19, STRASBOURG, FRANCE.
Full text not available from this repository.| Item Type: | Conference or Workshop Item (UNSPECIFIED) | ||||||||||||||||||
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| Divisions : | Surrey research (other units) | ||||||||||||||||||
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| Date : | 1 January 1999 | ||||||||||||||||||
| DOI : | 10.1016/S0008-6223(98)00269-3 | ||||||||||||||||||
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| Uncontrolled Keywords : | Science & Technology, Physical Sciences, Technology, Chemistry, Physical, Materials Science, Multidisciplinary, Chemistry, Materials Science, CHEMISTRY, PHYSICAL, MATERIALS SCIENCE, MULTIDISCIPLINARY, amorphous carbon, plasma deposition, chemical vapour deposition, annealing, electrical properties, THIN-FILMS | ||||||||||||||||||
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| Depositing User : | Symplectic Elements | ||||||||||||||||||
| Date Deposited : | 17 May 2017 11:48 | ||||||||||||||||||
| Last Modified : | 23 Jan 2020 17:17 | ||||||||||||||||||
| URI: | http://epubs.surrey.ac.uk/id/eprint/832776 |
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