REACTIVE FORMATION OF COBALT SILICIDE ON SINGLE-CRYSTAL SILICON UNDER RAPID ELECTRON-BEAM HEATING
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MAHMOOD, F, AHMED, H, JEYNES, C and GILLIN, WP (1992) REACTIVE FORMATION OF COBALT SILICIDE ON SINGLE-CRYSTAL SILICON UNDER RAPID ELECTRON-BEAM HEATING APPLIED SURFACE SCIENCE, 59 (1). pp. 55-62.
Full text not available from this repository.| Item Type: | Article | |||||||||||||||
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| Divisions : | Surrey research (other units) | |||||||||||||||
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| Date : | 1 May 1992 | |||||||||||||||
| DOI : | 10.1016/0169-4332(92)90168-W | |||||||||||||||
| Uncontrolled Keywords : | Science & Technology, Physical Sciences, Technology, Chemistry, Physical, Materials Science, Coatings & Films, Physics, Applied, Physics, Condensed Matter, Chemistry, Materials Science, Physics, CHEMISTRY, PHYSICAL, MATERIALS SCIENCE, COATINGS & FILMS, PHYSICS, APPLIED, PHYSICS, CONDENSED MATTER, SELF-ALIGNED COSI2, THIN-FILMS, INTERCONNECTION, DIFFUSION, DISILICIDE, SI | |||||||||||||||
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| Depositing User : | Symplectic Elements | |||||||||||||||
| Date Deposited : | 17 May 2017 11:32 | |||||||||||||||
| Last Modified : | 24 Jan 2020 20:58 | |||||||||||||||
| URI: | http://epubs.surrey.ac.uk/id/eprint/831744 |
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