Measurement of lateral stress in argon implanted thin gold films using quartz resonator techniques

Way, AS, Jeynes, C and Webb, RP (1999) Measurement of lateral stress in argon implanted thin gold films using quartz resonator techniques In: 11th International Conference on Ion Beam Modification of Materials (IBMM98), 1998-08-31 - 1998-09-04, ROYAL TROP INST, AMSTERDAM, NETHERLANDS.

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Item Type:	Conference or Workshop Item (UNSPECIFIED)
Divisions :	Surrey research (other units)
Authors :	Name Email ORCID Way, AS Jeynes, C c.jeynes@surrey.ac.uk Webb, RP r.webb@surrey.ac.uk
Date :	1 January 1999
DOI :	10.1016/S0168-583X(98)00879-9
Contributors :	Contribution Name Email ORCID publisher ELSEVIER SCIENCE BV,
Uncontrolled Keywords :	Science & Technology, Technology, Physical Sciences, Instruments & Instrumentation, Nuclear Science & Technology, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, INSTRUMENTS & INSTRUMENTATION, NUCLEAR SCIENCE & TECHNOLOGY, PHYSICS, ATOMIC, MOLECULAR & CHEMICAL, PHYSICS, NUCLEAR, sputtering, stress, quartz resonators, RBS
Related URLs :	Author
Depositing User :	Symplectic Elements
Date Deposited :	17 May 2017 11:31
Last Modified :	23 Jan 2020 16:57
URI:	http://epubs.surrey.ac.uk/id/eprint/831691

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