RBS/simulated annealing and FTIR characterisation of BCN films deposited by dual cathode magnetron sputtering

Barradas, NP, Jeynes, C, Kusano, Y, Evetts, JE and Hutchings, IM (1999) RBS/simulated annealing and FTIR characterisation of BCN films deposited by dual cathode magnetron sputtering In: 15th International Conference on the Application of Accelerators in Research and Industry, 1998-11-04 - 1998-11-07, UNIV N TEXAS, DENTON, TX.

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Item Type:	Conference or Workshop Item (UNSPECIFIED)
Divisions :	Surrey research (other units)
Authors :	Name Email ORCID Barradas, NP Jeynes, C c.jeynes@surrey.ac.uk Kusano, Y Evetts, JE Hutchings, IM
Date :	1 January 1999
Contributors :	Contribution Name Email ORCID Duggan, JL Morgan, IL publisher AMER INST PHYSICS,
Uncontrolled Keywords :	Science & Technology, Physical Sciences, Technology, Chemistry, Physical, Materials Science, Characterization & Testing, Physics, Atomic, Molecular & Chemical, Physics, Nuclear, Physics, Particles & Fields, Spectroscopy, Chemistry, Materials Science, Physics, CARBON NITRIDE FILMS, MECHANICAL-PROPERTIES, VAPOR-DEPOSITION, THIN-FILMS, NITROGEN, BORON, IMPLANTATION, COATINGS
Related URLs :	Author
Depositing User :	Symplectic Elements
Date Deposited :	17 May 2017 11:31
Last Modified :	23 Jan 2020 16:56
URI:	http://epubs.surrey.ac.uk/id/eprint/831682

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