Toward a Better Understanding of the Influence of the Hydrocarbon Precursor on the Mechanical Properties of a-C: H Coatings Synthesized by a Hybrid PECVD/PVD Method

Thiry, D, De Vreese, A, Renaux, F, Colaux, JL, Lucas, S, Guinet, Y, Paccou, L, Bousser, E, Snyders, R and Snyders, R (2015) Toward a Better Understanding of the Influence of the Hydrocarbon Precursor on the Mechanical Properties of a-C: H Coatings Synthesized by a Hybrid PECVD/PVD Method Plasma Processes and Polymers.

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Abstract

© 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. In this work, we provide new insight on the influence of the precursor (CH4 vs. C2H2) on the mechanical properties of a-C:H coatings synthesized in a hybrid PECVD/PVD process. For a given set of plasma parameters, the films synthesized in CH4/Ar gas mixture are found harder than the ones prepared in C2H2/Ar atmosphere despite their lower sp³ density and similar hydrogen content. This unusual behavior is attributed to different molecular organization of the polymeric network constituting the films. The latter is explained considering the influence of the chemical nature of the film-forming species on the cross-linking and branching degree of the films. The whole set of our results unambiguously demonstrates that additional factors than the sp³ and hydrogen content have to be considered for explaining the mechanical properties of a-C:H layers.

Item Type:	Article
Divisions :	Faculty of Engineering and Physical Sciences > Physics
Authors :	Name Email ORCID Thiry, D De Vreese, A Renaux, F Colaux, JL Lucas, S Guinet, Y Paccou, L Bousser, E Snyders, R Snyders, R
Date :	17 July 2015
DOI :	10.1002/ppap.201500050
Depositing User :	Symplectic Elements
Date Deposited :	28 Mar 2017 10:55
Last Modified :	31 Oct 2017 17:36
URI:	http://epubs.surrey.ac.uk/id/eprint/808356

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