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Characterisation of electron-beam deposited tungsten interconnects

Kerr, GL, Cox, DC, Stolojan, V, Silva, SRP, Baker, RT, Mobus, G and Brown, PD (2008) Characterisation of electron-beam deposited tungsten interconnects In: Electron Microscopy and Analysis Group Conference, 2007-09-03 - 2007-09-07, Glasgow Caledonian Univ, Glasgow, SCOTLAND.

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Item Type: Conference or Workshop Item (Conference Paper)
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre
Authors :
Kerr, GL
Cox, DC
Stolojan, V
Silva, SRP
Baker, RT
Mobus, G
Brown, PD
Date : 1 January 2008
DOI : 10.1088/1742-6596/126/1/012073
Contributors :
ContributionNameEmailORCID PUBLISHING LTD,
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Nanoscience & Nanotechnology, Materials Science, Multidisciplinary, Physics, Applied, Science & Technology - Other Topics, Materials Science, Physics, PLATINUM, GROWTH
Related URLs :
Additional Information : Copyright 2008 Institute of Physics. This is the author's accepted manuscript.
Depositing User : Symplectic Elements
Date Deposited : 13 Dec 2012 16:44
Last Modified : 31 Oct 2017 14:48

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