Targeting mass-selected cluster ions for the deposition of advanced carbonaceous materials using an inductively coupled plasma
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Zeze, DA, Silva, SRP, Brown, NMD, Joyce, AM and Anderson, CA (2002) Targeting mass-selected cluster ions for the deposition of advanced carbonaceous materials using an inductively coupled plasma JOURNAL OF APPLIED PHYSICS, 91 (4). pp. 1819-1827.
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Official URL: http://jap.aip.org/resource/1/japiau/v91/i4/p1819_...
| Item Type: | Article | ||||||||||||||||||
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| Divisions : | Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre | ||||||||||||||||||
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| Date : | 15 February 2002 | ||||||||||||||||||
| DOI : | 10.1063/1.1435417 | ||||||||||||||||||
| Uncontrolled Keywords : | Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, DIAMOND-LIKE CARBON, AMORPHOUS-CARBON, BEAM DEPOSITION, NITRIDE FILMS, OVERCOATS, GROWTH | ||||||||||||||||||
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| Depositing User : | Melanie Hughes | ||||||||||||||||||
| Date Deposited : | 21 Oct 2010 09:27 | ||||||||||||||||||
| Last Modified : | 31 Oct 2017 14:05 | ||||||||||||||||||
| URI: | http://epubs.surrey.ac.uk/id/eprint/2536 |
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