Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating
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Schwan, J, Ulrich, S, Roth, H, Ehrhardt, H, Silva, SRP, Robertson, J, Samlenski, R and Brenn, R (1996) Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating JOURNAL OF APPLIED PHYSICS, 79 (3). pp. 1416-1422.
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tetrahedral_amorphous_SILVA_96.pdf - Version of Record Download (215kB) |
Official URL: http://jap.aip.org/resource/1/japiau/v79/i3/p1416_...
| Item Type: | Article | |||||||||||||||||||||||||||
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| Divisions : | Faculty of Engineering and Physical Sciences > Electronic Engineering > Advanced Technology Institute > Nano-Electronics Centre | |||||||||||||||||||||||||||
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| Date : | 1 February 1996 | |||||||||||||||||||||||||||
| DOI : | 10.1063/1.360979 | |||||||||||||||||||||||||||
| Uncontrolled Keywords : | Science & Technology, Physical Sciences, Physics, Applied, Physics, PHYSICS, APPLIED, DIAMOND-LIKE CARBON, RAMAN-SCATTERING, DEPOSITION, ENERGY, PRESSURE, GROWTH | |||||||||||||||||||||||||||
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| Depositing User : | Melanie Hughes | |||||||||||||||||||||||||||
| Date Deposited : | 29 Sep 2010 09:18 | |||||||||||||||||||||||||||
| Last Modified : | 31 Oct 2017 14:05 | |||||||||||||||||||||||||||
| URI: | http://epubs.surrey.ac.uk/id/eprint/2373 |
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