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Items where Academic/Research unit is "Faculty of Engineering and Physical Sciences > Electronic Engineering"

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B

Behringer, Uwe F. W., James, A., Felten, F., Polli, M., England, Jonathan, Marschner, Thomas and Vandenberghe, Geert (2000) Reticle imaging and metrology using a CD-SEM at IMEC In: 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 15 Nov 1999, Munich, Germany.

E

England, et al. (2000) Beam stop apparatus for an ion implanter 6,060,715.

England, et al. (2000) Ion beam apparatus and a method for neutralizing space charge in an ion beam 6,060,715.

England, et al. (2000) Method and apparatus for ion beam scanning in an ion implanter 6,060,715.

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