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Items where Academic/Research unit is "Faculty of Engineering and Physical Sciences > Electronic Engineering"

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Behringer, Uwe F. W., James, A., Felten, F., Polli, M., England, Jonathan, Marschner, Thomas and Vandenberghe, Geert (2000) Reticle imaging and metrology using a CD-SEM at IMEC In: 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 15 Nov 1999, Munich, Germany.


England, et al. (2000) Beam stop apparatus for an ion implanter 6,060,715.

England, et al. (2000) Ion beam apparatus and a method for neutralizing space charge in an ion beam 6,060,715.

England, et al. (2000) Method and apparatus for ion beam scanning in an ion implanter 6,060,715.

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