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Items where Academic/Research unit is "Faculty of Engineering and Physical Sciences > Electronic Engineering"

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Number of items: 5.

E

England, Jonathan, Joyce, L., Burgess, C., Moffatt, S., Foad, M., Armour, D. and Current, M. (1997) The Applied Materials xRLEAP ion implanter for ultra shallow junction formation In: 11th International Conference on Ion Implantation Technology, 16-21 Jun 1996, Austin, Texas, USA.

England, Jonathan, McLaren, M., Mitchell, R. and Uritsky, Y. (1997) Elemental analysis of ion implantation added particles In: 11th International Conference on Ion Implantation Technology, 16-21 Jun 1996, Austin, Texas, USA.

F

Foad, M.A., England, Jonathan, Moffatt, S. and Armour, D.G. (1997) Analysis of sub-1keV Implants in Silicon using SIMS, SRP, MEISS and DLTS: The xRLEAP Low Energy, High Current Implanter Evaluated In: 11th International Conference on Ion Implantation Technology, 16-21 Jun 1996, Austin, Texas, USA.

H

Hatzopoulos, N., Suder, S., van den Berg, J.A., Donnelly, S.E., Cook, C.E.A., Armour, D.G., Panknin, D., Fukarek, W., Lucassen, M., Frey, L., Foad, M.A., England, Jonathan, Moffatt, S., Bailey, P., Noakes, C.T. and Ohno, H. (1997) Range and damage distributions in ultra-low energy boron implantation into silicon In: 11th International Conference on Ion Implantation Technology, 16-21 Jun 1996, Austin, Texas, USA.

L

Lowrie, C., England, Jonathan, Hunter, A., Burgin, D. and Harrison, B. (1997) Factors affecting the design of the Applied Materials xR80 implant family In: 11th International Conference on Ion Implantation Technology, 16-21 Jun 1996, Austin, Texas, USA.

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