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Items where Author is "Yeong, S"

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Number of items: 5.

Article

Smith, AJ, Gwilliam, RM, Stolojan, V, Knights, AP, Coleman, PG, Kallis, A and Yeong, SH (2009) Enhancement of phosphorus activation in vacancy engineered thin silicon-on-insulator substrates J APPL PHYS, 106 (10), 103514.

Kah, M, Smith, AJ, Hamilton, JJ, Sharp, J, Yeong, SH, Colombeau, B, Gwilliam, R, Webb, RP and Kirkby, KJ (2008) Interaction of the end of range defect band with the upper buried oxide interface for B and BF2 implants in Si and silicon on insulator with and without preamorphizing implant JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 26 (1). pp. 347-350.

Conference or Workshop Item

Kah, M, Smith, AJ, Hamilton, JJ, Yeong, SH, Columbeau, B, Gwilliam, R, Webb, RP and Kirkby, KJ (2008) A Comparative Study of Interaction of End of Range (EOR) Defect Band with Upper Buried Oxide (BOX) Interface for B and BF(2) Implants in SOI and Bulk Silicon with Pre-Amorphizing Implant In: 17th International Conference on Ion Implantation Technology, 2008-06-08 - 2008-06-13, Monterey, CA.

Smith, AJ, Yeong, SH, Colombeau, B, Sealy, BJ and Gwilliam, RM (2008) The Formation of Ultra-Shallow Phosphorous Doped Layers Using Vacancy Engineering In: 17th International Conference on Ion Implantation Technology, 2008-06-08 - 2008-06-13, Monterey, CA.

Smith, AJ, Antwis, LD, Yeong, SH, Knights, AP, Colombeau, B, Sealy, BJ and Gwilliam, RM (2008) Junction Leakage Analysis of Vacancy Engineered Ultra-Shallow p-type Layers In: 17th International Conference on Ion Implantation Technology, 2008-06-08 - 2008-06-13, Monterey, CA.

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