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Items where Author is "Van den Berg, J"

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England, Jonathan, Van den Berg, Jaap and Rossall, Andrew (2019) Use of TRIDYN and medium energy ion scattering to calibrate an industrial arsenic plasma doping process Journal of Vacuum Science & Technology B, 37 (3), 031206. 031206-1 - 031206-10.

Conference or Workshop Item

Van den Berg, JA, Rossall, AK and England, J (2018) Arsenic plasma doping in Si characterized by high resolution medium energy ion scattering depth profile analysis In: 22nd International Conference on Ion Implantation Technology, 16 - 21 September 2018, Wurzburg, Germany.

Foad, M., Armour, D., Kilmes, Z., Hilton, B., Van den Berg, J., Cook, C., Chew, A., Sykes, D., England, Jonathan, Devaney, A., Ito, H., Bryan, N., Plumb, F., Kindersley, P. and Moffatt, S. (1995) Dedicated Test Facility for Ion Beam Quality Evaluation and Spectroscopies In: Ion Implantation Technology 94 (IIT 94), 13-17 Jun 1994, Catania, Italy.

England, Jonathan, Bryan, N., Ito, H., Armour, D., Van den Berg, J., Fotheringham, I. and Kindersley, P. (1993) Measurement of Beam Potentials and Surface Voltages on Semiconductor Wafers Using an Ion Spectrometer In: Ninth International Conference on Ion Implantation Technology (IIT 92), Sep 20-24, 1992, Gainesvile, Florida, USA.


Armour, et al. (1995) Spectrum analyzer in an ion implanter 5,457,324.

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