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Swerts, J, Deweerd, W, Wang, CG, Fedorenko, Y, Delabie, A, Shero, E, Zhao, C, Maes, JW, De Gendt, S and Wilk, G (2006) Highly scalable ALD-deposited hafnium silicate gate stacks for low standby power applications Materials Research Society Symposium Proceedings, 917. pp. 155-160.

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