University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Items where Author is "Plumb, F"

Up a level
Export as [feed] RSS 1.0 [feed] RSS 2.0
Group by: Item Type | No Grouping
Number of items: 4.

Conference or Workshop Item

Foad, M., Armour, D., Kilmes, Z., Hilton, B., Van den Berg, J., Cook, C., Chew, A., Sykes, D., England, Jonathan, Devaney, A., Ito, H., Bryan, N., Plumb, F., Kindersley, P. and Moffatt, S. (1995) Dedicated Test Facility for Ion Beam Quality Evaluation and Spectroscopies In: Ion Implantation Technology 94 (IIT 94), 13-17 Jun 1994, Catania, Italy.

Ito, H., Kamata, T., England, Jonathan, Fotheringham, I., Plumb, F. and Current, M. (1995) The Precision Implant 9500 Plasma Flood System In: Ion Implantation Technology 94 (IIT 94), 13-17 Jun 1994, Catania, Italy.

Ito, H., Plumb, F., England, Jonathan, Fotheringham, I. and Kindersley, P. (1993) Considerations for Advanced Charging Solutions Applied to ULSI Device Fabrication In: Ninth International Conference on Ion Implantation Technology (IIT 92), Sep 20-24, 1992, Gainesvile, Florida, USA.

Patent

Ito, et al. (1995) Plasma flood system for the reduction of charging of wafers during ion implantation 5,399,871.

This list was generated on Fri Nov 24 07:44:08 2017 UTC.

Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800