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Items where Author is "Patel, C"

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Article

Nejim, A, Knights, AP, Jeynes, C, Coleman, PG and Patel, CJ (1998) Profile broadening of high dose germanium implants into (100) silicon at elevated temperatures due to channeling JOURNAL OF APPLIED PHYSICS, 83 (7). pp. 3565-3573.

Conference or Workshop Item

Nejim, A, Jeynes, C, Webb, RP, Cowern, NEB and Patel, CJ (1997) Influence of dynamic annealing on the depth distribution of germanium implanted in (100) silicon at elevated temperatures In: Symposium on Defects and Diffusion in Silicon Processing, 1997-04-01 - 1997-04-04, SAN FRANCISCO, CA.

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