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Items where Author is "Olson, J"

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Number of items: 4.


England, et al. (2009) Ion implantation device with a dual pumping mode and method thereof 7,622,722.

Renau, et al. (2009) Techniques for providing a ribbon-shaped gas cluster ion beam 7,547,900.

Low, et al. (2008) Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam control 7,361,913.

Olson, et al. (2008) Technique for uniformity tuning in an ion implanter system 7,355,188.

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