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Patent

England, et al. (2013) Techniques for temperature-controlled ion implantation 8,450,193.

Blake, et al. (2011) Techniques for temperature controlled ion implantation 7,993,698.

England, et al. (2011) Technique for low-temperature ion implantation 7,935,942.

England, et al. (2010) Techniques for temperature-controlled ion implantation 7,655,933.

England, et al. (2009) Techniques for low-temperature ion implantation 7,528,392.

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