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Items where Author is "KEENAN, W"

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Article

CURRENT, MI, OHNO, N, HURLEY, K, KEENAN, WA, GUITNER, TL and JEYNES, C (1993) MICROUNIFORMITY MEASUREMENTS OF ION-IMPLANTED SILICON SOLID STATE TECHNOLOGY, 36 (7). 111-&.

Conference or Workshop Item

CURRENT, MI, GUITNER, T, OHNO, N, HURLEY, K, KEENAN, WA, JOHNSON, W, HILLARD, RJ and JEYNES, C (1991) MONITORING THE MICRO-UNIFORMITY PERFORMANCE OF A SPINNING DISK IMPLANTER In: 8TH INTERNATIONAL CONF ON ION IMPLANTATION TECHNOLOGY, 1990-07-30 - 1990-08-03, UNIV SURREY, GUILDFORD, ENGLAND.

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