University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Items where Author is "Fotheringham, I"

Up a level
Export as [feed] RSS 1.0 [feed] RSS 2.0
Group by: Item Type | No Grouping
Number of items: 6.

Conference or Workshop Item

Malone, P., Shull, W., England, Jonathan and Fotheringham, I. (1995) A Demonstration using the THOR Monitor that Beam Quality Can Affect Device Yield In: Ion Implantation Technology 94 (IIT 94), 13-17 Jun 1994, Catania, Italy.

Szajnowski, W., England, Jonathan, Stephens, K., Fotheringham, I., Scargill, D. and Rimini, E. (1995) Measuring a Two Dimensional Profile of an Ion Beam In: Ion Implantation Technology 94 (IIT 94), 13-17 Jun 1994, Catania, Italy.

Ito, H., Kamata, T., England, Jonathan, Fotheringham, I., Plumb, F. and Current, M. (1995) The Precision Implant 9500 Plasma Flood System In: Ion Implantation Technology 94 (IIT 94), 13-17 Jun 1994, Catania, Italy.

Ito, H., Plumb, F., England, Jonathan, Fotheringham, I. and Kindersley, P. (1993) Considerations for Advanced Charging Solutions Applied to ULSI Device Fabrication In: Ninth International Conference on Ion Implantation Technology (IIT 92), Sep 20-24, 1992, Gainesvile, Florida, USA.

England, Jonathan, Bryan, N., Ito, H., Armour, D., Van den Berg, J., Fotheringham, I. and Kindersley, P. (1993) Measurement of Beam Potentials and Surface Voltages on Semiconductor Wafers Using an Ion Spectrometer In: Ninth International Conference on Ion Implantation Technology (IIT 92), Sep 20-24, 1992, Gainesvile, Florida, USA.

Patent

Ito, et al. (1995) Plasma flood system for the reduction of charging of wafers during ion implantation 5,399,871.

This list was generated on Sat Nov 18 10:05:15 2017 UTC.

Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800