University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Items where Author is "Felten, F"

Up a level
Export as [feed] RSS 1.0 [feed] RSS 2.0
Group by: Item Type | No Grouping
Number of items: 2.

Conference or Workshop Item

Hoffmann, T., Storms, G., Ercken, M., Maenhoudt, M., Pollentier, I., Ronse, K., Felten, F., Wong, E. and England, Jonathan (2001) Impact of 193nm Resist Shrinkage on CD-SEM Metrology In: Interface 2001 Conference, 2001.

Behringer, Uwe F. W., James, A., Felten, F., Polli, M., England, Jonathan, Marschner, Thomas and Vandenberghe, Geert (2000) Reticle imaging and metrology using a CD-SEM at IMEC In: 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 15 Nov 1999, Munich, Germany.

This list was generated on Sun Sep 24 12:22:41 2017 UTC.

Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800