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Items where Author is "Felten, F"

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Hoffmann, T., Storms, G., Ercken, M., Maenhoudt, M., Pollentier, I., Ronse, K., Felten, F., Wong, E. and England, Jonathan (2001) Impact of 193nm Resist Shrinkage on CD-SEM Metrology In: Interface 2001 Conference, 2001.

Behringer, Uwe F. W., James, A., Felten, F., Polli, M., England, Jonathan, Marschner, Thomas and Vandenberghe, Geert (2000) Reticle imaging and metrology using a CD-SEM at IMEC In: 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 15 Nov 1999, Munich, Germany.

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