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Items where Author is "Deweerd, W"

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Fedorenko, Y, Swerts, J, Maes, JW, Tois, E, Haukka, S, Wang, CG, Wilk, G, Delabie, A, Deweerd, W and De Gendt, S (2007) Atomic layer deposition of hafnium silicate from HfCl4, SiCl4, and H2O Electrochemical and Solid-State Letters, 10 (5). pp. 149-152.

Swerts, J, Deweerd, W, Wang, CG, Fedorenko, Y, Delabie, A, Shero, E, Zhao, C, Maes, JW, De Gendt, S and Wilk, G (2006) Highly scalable ALD-deposited hafnium silicate gate stacks for low standby power applications Materials Research Society Symposium Proceedings, 917. pp. 155-160.

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