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Items where Author is "Caymax, M"

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Delabie, A, Nyns, L, Bellenger, F, Caymax, M, Conard, T, Franquet, A, Houssa, M, Lin, D, Meuris, M, Ragnarsson, LA, Sioncke, S, Swerts, J, Fedorenko, Y, Maes, JW, Van Elshocht, S and De Gendt, S (2007) Atomic Layer Deposition of hafnium based gate dielectric layers for CMOS applications ECS Transactions, 11 (7). pp. 227-241.

Delabie, A, Pourtois, G, Caymax, M, De Gendt, S, Ragnarsson, LA, Heyns, M, Fedorenko, Y, Swerts, J and Maes, JW (2007) Atomic layer deposition of hafnium silicate gate dielectric layers Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 25 (4). pp. 1302-1308.

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