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Items where Author is "Caymax, M"

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Article

Delabie, A, Nyns, L, Bellenger, F, Caymax, M, Conard, T, Franquet, A, Houssa, M, Lin, D, Meuris, M, Ragnarsson, LA, Sioncke, S, Swerts, J, Fedorenko, Y, Maes, JW, Van Elshocht, S and De Gendt, S (2007) Atomic Layer Deposition of hafnium based gate dielectric layers for CMOS applications ECS Transactions, 11 (7). pp. 227-241.

Delabie, A, Pourtois, G, Caymax, M, De Gendt, S, Ragnarsson, LA, Heyns, M, Fedorenko, Y, Swerts, J and Maes, JW (2007) Atomic layer deposition of hafnium silicate gate dielectric layers Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 25 (4). pp. 1302-1308.

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