Items where Author is "Busch, E"
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Conference or Workshop Item
Lazzeri, P, Oehrlein, GS, Stueber, GJ, McGowan, R, Busch, E, Pederzoli, S, Jeynes, C, Bersani, M and Anderle, M (2008) Interactions of photoresist stripping plasmas with nanoporous organo-silicate ultra low dielectric constant dielectrics In: 28th Dry Process Symposium (DPS), 2006-11-29 - 2006-11-30, Nagoya, JAPAN.