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Items where Author is "Anderle, M"

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Gennaro, S, Giubertoni, D, Bersani, M, Foggiato, J, Yoo, WS, Gwilliam, R and Anderle, M (2006) The effect of flash annealing on the electrical properties of indium/carbon Co-implants in silicon AIP Conference Proceedings, 866. pp. 113-116.

Conference or Workshop Item

Lazzeri, P, Oehrlein, GS, Stueber, GJ, McGowan, R, Busch, E, Pederzoli, S, Jeynes, C, Bersani, M and Anderle, M (2008) Interactions of photoresist stripping plasmas with nanoporous organo-silicate ultra low dielectric constant dielectrics In: 28th Dry Process Symposium (DPS), 2006-11-29 - 2006-11-30, Nagoya, JAPAN.

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