Investigating the formation of isotopically pure layers for quantum computers using ion implantation and layer exchange
England, Jonathan, Cox, David, Cassidy, Nathan, Mirkhaydarov, Bobur and Perez-Fadon, Andres (2019) Investigating the formation of isotopically pure layers for quantum computers using ion implantation and layer exchange Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 461. pp. 30-36.
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Abstract
Quantum computers have been proposed that exploit entangled quantum states between atoms that are isolated from environmental perturbations in a “semiconductor vacuum” which can be formed by cryogenically cooling an isotopically pure, defect free crystalline layer consisting of Si, or Ge. In a preliminary investigation of an implant and deposition layer exchange technique to produce such “vacuums”, a layer of aluminium was implanted with 28Si using a conventional implanter. After annealing and cross sectioning, layer exchange was observed to have produced multiple isolated crystals in a cross sectional TEM image. Further deposited Al layers were implanted with Ge using a SIMPLE (Single Ion Multispecies Positioning at Low Energy) implanter over a range of fluences. After anneals at 250 °C and Al removal, crystals of Ge (which also contained Si) were seen at areal densities that increased with implant fluence.
Item Type: | Article | ||||||||||||||||||
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Divisions : | Faculty of Engineering and Physical Sciences > Electronic Engineering | ||||||||||||||||||
Authors : |
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Date : | 15 December 2019 | ||||||||||||||||||
Funders : | Engineering and Physical Sciences Research Council (EPSRC) | ||||||||||||||||||
DOI : | 10.1016/j.nimb.2019.09.013 | ||||||||||||||||||
Copyright Disclaimer : | © 2019. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/ | ||||||||||||||||||
Depositing User : | Clive Harris | ||||||||||||||||||
Date Deposited : | 25 Sep 2019 10:35 | ||||||||||||||||||
Last Modified : | 22 Oct 2019 11:49 | ||||||||||||||||||
URI: | http://epubs.surrey.ac.uk/id/eprint/852787 |
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