Investigating the formation of isotopically pure layers for quantum computers using ion implantation and layer exchange

England, Jonathan, Cox, David, Cassidy, Nathan, Mirkhaydarov, Bobur and Perez-Fadon, Andres (2019) Investigating the formation of isotopically pure layers for quantum computers using ion implantation and layer exchange Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 461. pp. 30-36.

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Abstract

Quantum computers have been proposed that exploit entangled quantum states between atoms that are isolated from environmental perturbations in a “semiconductor vacuum” which can be formed by cryogenically cooling an isotopically pure, defect free crystalline layer consisting of Si, or Ge. In a preliminary investigation of an implant and deposition layer exchange technique to produce such “vacuums”, a layer of aluminium was implanted with 28Si using a conventional implanter. After annealing and cross sectioning, layer exchange was observed to have produced multiple isolated crystals in a cross sectional TEM image. Further deposited Al layers were implanted with Ge using a SIMPLE (Single Ion Multispecies Positioning at Low Energy) implanter over a range of fluences. After anneals at 250 °C and Al removal, crystals of Ge (which also contained Si) were seen at areal densities that increased with implant fluence.

Item Type:	Article
Divisions :	Faculty of Engineering and Physical Sciences > Electronic Engineering
Authors :	Name Email ORCID England, Jonathan j.england@surrey.ac.uk Cox, David D.Cox@surrey.ac.uk Cassidy, Nathan n.cassidy@surrey.ac.uk Mirkhaydarov, Bobur bm00071@surrey.ac.uk Perez-Fadon, Andres
Date :	15 December 2019
Funders :	Engineering and Physical Sciences Research Council (EPSRC)
DOI :	10.1016/j.nimb.2019.09.013
Copyright Disclaimer :	© 2019. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
Depositing User :	Clive Harris
Date Deposited :	25 Sep 2019 10:35
Last Modified :	22 Oct 2019 11:49
URI:	http://epubs.surrey.ac.uk/id/eprint/852787

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