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TRI3DYN Modelling and MEIS Measurements of Arsenic Dopant Profiles in FinFETS

England, Jonathan, Dos Santos Rosa, Lucio, Min, Won Ja and Kim, Jwasoon (2018) TRI3DYN Modelling and MEIS Measurements of Arsenic Dopant Profiles in FinFETS In: 22nd International Conference on Ion Implantation Technology, 16 - 21 September 2018, Wurzburg, Germany.

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Abstract

Implant processes that produced a variety of arsenic dopant profiles in 130nm tall, 110nm pitch FinFET test structures were modelled using the dynamic, binary collision approximation code TRI3DYN and measured using a commercial time of flight medium energy ion scattering (TOF-MEIS) tool. Dopant profiles in the tops and sidewalls of the FinFETS were extracted from MEIS spectra using the 3D capability of the POWERMEIS code. The qualitative agreement between TRI3DYN predictions and MEIS measurements showed the need for POWERMEIS to account for the effects of multiple scattering (which has yet to be implemented) before more quantitative conclusions regarding the absolute accuracy of TRI3DYN can be made. Nevertheless, this work has shown the promise of TRI3DYN and TOF-MEIS as tools to predict and characterise the outcomes of implantation into 3D structures.

Item Type: Conference or Workshop Item (Conference Paper)
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering
Authors :
NameEmailORCID
England, Jonathanj.england@surrey.ac.uk
Dos Santos Rosa, Luciol.dossantosrosa@surrey.ac.uk
Min, Won Ja
Kim, Jwasoon
Date : 2018
DOI : 10.1109/IIT.2018.8807967
Copyright Disclaimer : © 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Uncontrolled Keywords : Ion-implantation, ion beam modelling, TRI3DYN, plasma doping, PLAD, medium energy ion scattering, TOF-MEIS, POWERMEIS, FinFET
Related URLs :
Depositing User : Users 8 not found.
Date Deposited : 06 Dec 2018 12:20
Last Modified : 24 Feb 2020 13:39
URI: http://epubs.surrey.ac.uk/id/eprint/849991

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