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Fabrication and Calibration of Directionally-Resolved Micropillars Using Off-the-Shelf Piezoresistive Dies

Kong, Xiaozhi, Poulain, Arthur, Nathan, Paul and Birch, David M (2018) Fabrication and Calibration of Directionally-Resolved Micropillars Using Off-the-Shelf Piezoresistive Dies IEEE Sensors Journal, 19 (4). pp. 1252-1259.

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Abstract

A two-component micropillar system has been developed for use in flow characterization and control applications. It is demonstrated that the piezoresistive elements in a conventional pressure sensing die can be used to measure moments directly applied to the die with reasonable sensitivity. The concept is then demonstrated by bonding a small, rigid pillar to the centre of a commercially-available, off-the-shelf doped silicon pressure sensing membrane with integrated piezoresistive bridge elements. The signal response of the system is then calibrated against aerodynamic loading, and a typical sensitivity of 70 mV/mNm is demonstrated. The functionality of the micropillars in flow control applications is verified by recessing the pillar below a flat surface on which a model boundary layer is developed. By processing the signals through the membrane bridge-arms independently, directionally-resolved forces may also be obtained.

Item Type: Article
Divisions : Faculty of Engineering and Physical Sciences > Mechanical Engineering Sciences
Authors :
NameEmailORCID
Kong, Xiaozhi
Poulain, Arthur
Nathan, Paulp.nathan@surrey.ac.uk
Birch, David MD.Birch@surrey.ac.uk
Date : 15 November 2018
DOI : 10.1109/JSEN.2018.2881497
Copyright Disclaimer : © 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Uncontrolled Keywords : Sensors; Piezoresistance; Stress; Sensitivity; Fabrication; Loading; Sea measurements; Aerospace testing; Fluid flow measurement; Force measurement
Related URLs :
Depositing User : Melanie Hughes
Date Deposited : 16 Nov 2018 09:17
Last Modified : 05 Feb 2019 13:53
URI: http://epubs.surrey.ac.uk/id/eprint/849883

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