University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Trimming of surface acoustic wave devices: Oxygen bombardment of aluminium films and quartz substrates.

Chereckdjian, S. (1984) Trimming of surface acoustic wave devices: Oxygen bombardment of aluminium films and quartz substrates. Doctoral thesis, University of Surrey (United Kingdom)..

[img]
Preview
Text
10798322.pdf
Available under License Creative Commons Attribution Non-commercial Share Alike.

Download (5MB) | Preview

Abstract

17atoms cm-2. This blistering was due to accumulation of oxygen at the aluminium-quartz interface. With these results it is then possible to explain the change in the resonant frequency of a S. A. W. resonator after implanting with 50keV O2+ ions. Additional work (presented in Appendix 1) deals with the investigation of the mass loading and lateral stress caused by argon implantation of aluminium, and the angular variation of the sputtering yield (S0) of gold and germanium, with the same ion species. Both results were obtained using the triple resonator technique.

Item Type: Thesis (Doctoral)
Divisions : Theses
Authors :
NameEmailORCID
Chereckdjian, S.
Date : 1984
Contributors :
ContributionNameEmailORCID
http://www.loc.gov/loc.terms/relators/THS
Additional Information : Thesis (Ph.D.)--University of Surrey (United Kingdom), 1984.
Depositing User : EPrints Services
Date Deposited : 22 Jun 2018 13:00
Last Modified : 06 Nov 2018 16:52
URI: http://epubs.surrey.ac.uk/id/eprint/847301

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year


Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800