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RBS as a new primary direct reference method for measuring quantity of material

Jeynes, C. (2016) RBS as a new primary direct reference method for measuring quantity of material Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 406 (Part A). pp. 30-31.

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The quantity of material in thin films can be measured reliably, non-destructively, and at an absolute traceable accuracy with a combined standard uncertainty of 1% by Rutherford backscattering spectrometry (RBS). We have demonstrated a measurement protocol for the determination of quantity of material by RBS that has been accredited at this accuracy to the ISO 17025 standard by the United Kingdom Accreditation Service (UKAS). The method is entirely traceable to SI units relying on no artefacts, and thus qualifies as a primary direct reference method as defined by the ISO Guide 35:1985 (paragraph 9.4.1).

Item Type: Article
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering
Authors :
Date : 8 December 2016
DOI : 10.1016/j.nimb.2016.11.041
Copyright Disclaimer : © 2016 Elsevier B.V. All rights reserved.
Uncontrolled Keywords : Rutherford backscattering spectrometry; Accuracy; Quantity of Material; ISO standards; Metrology
Depositing User : Clive Harris
Date Deposited : 14 Mar 2018 14:11
Last Modified : 16 Jan 2019 19:08

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