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Measurement of Beam Potentials and Surface Voltages on Semiconductor Wafers Using an Ion Spectrometer

England, Jonathan, Bryan, N., Ito, H., Armour, D., Van den Berg, J., Fotheringham, I. and Kindersley, P. (1993) Measurement of Beam Potentials and Surface Voltages on Semiconductor Wafers Using an Ion Spectrometer In: Ninth International Conference on Ion Implantation Technology (IIT 92), Sep 20-24, 1992, Gainesvile, Florida, USA.

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Item Type: Conference or Workshop Item (Conference Paper)
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering
Authors :
NameEmailORCID
England, Jonathanj.england@surrey.ac.ukUNSPECIFIED
Bryan, N.UNSPECIFIEDUNSPECIFIED
Ito, H.UNSPECIFIEDUNSPECIFIED
Armour, D.UNSPECIFIEDUNSPECIFIED
Van den Berg, J.UNSPECIFIEDUNSPECIFIED
Fotheringham, I.UNSPECIFIEDUNSPECIFIED
Kindersley, P.UNSPECIFIEDUNSPECIFIED
Date : 31 May 1993
Copyright Disclaimer : © North Holland 1993
Contributors :
ContributionNameEmailORCID
http://www.loc.gov/loc.terms/relators/EDTDowney, D. F.UNSPECIFIEDUNSPECIFIED
http://www.loc.gov/loc.terms/relators/EDTFarley, M.UNSPECIFIEDUNSPECIFIED
http://www.loc.gov/loc.terms/relators/EDTJones, K.S.UNSPECIFIEDUNSPECIFIED
http://www.loc.gov/loc.terms/relators/EDTRyding, G.UNSPECIFIEDUNSPECIFIED
Additional Information : Publisher: North-Holland Publishing Co.
Depositing User : Clive Harris
Date Deposited : 16 Jun 2017 08:52
Last Modified : 16 Jun 2017 08:52
URI: http://epubs.surrey.ac.uk/id/eprint/841405

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