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Dedicated Test Facility for Ion Beam Quality Evaluation and Spectroscopies

Foad, M., Armour, D., Kilmes, Z., Hilton, B., Van den Berg, J., Cook, C., Chew, A., Sykes, D., England, Jonathan, Devaney, A., Ito, H., Bryan, N., Plumb, F., Kindersley, P. and Moffatt, S. (1995) Dedicated Test Facility for Ion Beam Quality Evaluation and Spectroscopies In: Ion Implantation Technology 94 (IIT 94), 13-17 Jun 1994, Catania, Italy.

Full text not available from this repository.
Item Type: Conference or Workshop Item (Conference Paper)
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering
Authors :
NameEmailORCID
Foad, M.UNSPECIFIEDUNSPECIFIED
Armour, D.UNSPECIFIEDUNSPECIFIED
Kilmes, Z.UNSPECIFIEDUNSPECIFIED
Hilton, B.UNSPECIFIEDUNSPECIFIED
Van den Berg, J.UNSPECIFIEDUNSPECIFIED
Cook, C.UNSPECIFIEDUNSPECIFIED
Chew, A.UNSPECIFIEDUNSPECIFIED
Sykes, D.UNSPECIFIEDUNSPECIFIED
England, Jonathanj.england@surrey.ac.ukUNSPECIFIED
Devaney, A.UNSPECIFIEDUNSPECIFIED
Ito, H.UNSPECIFIEDUNSPECIFIED
Bryan, N.UNSPECIFIEDUNSPECIFIED
Plumb, F.UNSPECIFIEDUNSPECIFIED
Kindersley, P.UNSPECIFIEDUNSPECIFIED
Moffatt, S.UNSPECIFIEDUNSPECIFIED
Date : 16 May 1995
Copyright Disclaimer : © North Holland 1995
Contributors :
ContributionNameEmailORCID
http://www.loc.gov/loc.terms/relators/EDTCoffa, S.UNSPECIFIEDUNSPECIFIED
http://www.loc.gov/loc.terms/relators/EDTFerla, G.UNSPECIFIEDUNSPECIFIED
http://www.loc.gov/loc.terms/relators/EDTRimini, E.UNSPECIFIEDUNSPECIFIED
http://www.loc.gov/loc.terms/relators/EDTPriolo, F.UNSPECIFIEDUNSPECIFIED
Additional Information : Publisher: North Holland
Depositing User : Clive Harris
Date Deposited : 15 Jun 2017 15:02
Last Modified : 15 Jun 2017 15:02
URI: http://epubs.surrey.ac.uk/id/eprint/841402

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