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The Precision Implant 9500 Plasma Flood System

Ito, H., Kamata, T., England, Jonathan, Fotheringham, I., Plumb, F. and Current, M. (1995) The Precision Implant 9500 Plasma Flood System In: Ion Implantation Technology 94 (IIT 94), 13-17 Jun 1994, Catania, Italy.

Full text not available from this repository.
Item Type: Conference or Workshop Item (Conference Paper)
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering
Authors :
Ito, H.
Kamata, T.
Fotheringham, I.
Plumb, F.
Current, M.
Date : 16 May 1995
Copyright Disclaimer : © North Holland 1995
Contributors :
Coffa, S.
Ferla, G.
Rimini, E.
Priolo, F.
Additional Information : Publisher: North Holland
Depositing User : Clive Harris
Date Deposited : 15 Jun 2017 10:46
Last Modified : 16 Jan 2019 18:53

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