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The Precision Implant 9500 Plasma Flood System

Ito, H., Kamata, T., England, Jonathan, Fotheringham, I., Plumb, F. and Current, M. (1995) The Precision Implant 9500 Plasma Flood System In: Ion Implantation Technology 94 (IIT 94), 13-17 Jun 1994, Catania, Italy.

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Item Type: Conference or Workshop Item (Conference Paper)
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering
Authors :
NameEmailORCID
Ito, H.UNSPECIFIEDUNSPECIFIED
Kamata, T.UNSPECIFIEDUNSPECIFIED
England, Jonathanj.england@surrey.ac.ukUNSPECIFIED
Fotheringham, I.UNSPECIFIEDUNSPECIFIED
Plumb, F.UNSPECIFIEDUNSPECIFIED
Current, M.UNSPECIFIEDUNSPECIFIED
Date : 16 May 1995
Copyright Disclaimer : © North Holland 1995
Contributors :
ContributionNameEmailORCID
UNSPECIFIEDCoffa, S.UNSPECIFIEDUNSPECIFIED
UNSPECIFIEDFerla, G.UNSPECIFIEDUNSPECIFIED
UNSPECIFIEDRimini, E.UNSPECIFIEDUNSPECIFIED
UNSPECIFIEDPriolo, F.UNSPECIFIEDUNSPECIFIED
Additional Information : Publisher: North Holland
Depositing User : Clive Harris
Date Deposited : 15 Jun 2017 10:46
Last Modified : 15 Jun 2017 10:46
URI: http://epubs.surrey.ac.uk/id/eprint/841391

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