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Charged particle energy spectrometers and their applications in fundamental studies of wafer charging and ion beam tuning phenomena

England, Jonathan, Cook, C., Armour, D. and Foad, M. (1995) Charged particle energy spectrometers and their applications in fundamental studies of wafer charging and ion beam tuning phenomena In: Ion Implantation Technology 94 (IIT 94), 13-17 Jun 1994, Catania, Italy.

Full text not available from this repository.
Item Type: Conference or Workshop Item (Conference Paper)
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering
Authors :
NameEmailORCID
England, Jonathanj.england@surrey.ac.ukUNSPECIFIED
Cook, C.UNSPECIFIEDUNSPECIFIED
Armour, D.UNSPECIFIEDUNSPECIFIED
Foad, M.UNSPECIFIEDUNSPECIFIED
Date : 16 May 1995
Copyright Disclaimer : © North Holland 1995
Contributors :
ContributionNameEmailORCID
http://www.loc.gov/loc.terms/relators/EDTCoffa, S.UNSPECIFIEDUNSPECIFIED
http://www.loc.gov/loc.terms/relators/EDTFerla, G.UNSPECIFIEDUNSPECIFIED
http://www.loc.gov/loc.terms/relators/EDTRimini, E.UNSPECIFIEDUNSPECIFIED
http://www.loc.gov/loc.terms/relators/EDTPriolo, F.UNSPECIFIEDUNSPECIFIED
Additional Information : Publisher: North Holland
Depositing User : Clive Harris
Date Deposited : 15 Jun 2017 09:44
Last Modified : 15 Jun 2017 09:44
URI: http://epubs.surrey.ac.uk/id/eprint/841386

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