University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Impact of 193nm Resist Shrinkage on CD-SEM Metrology

Hoffmann, T., Storms, G., Ercken, M., Maenhoudt, M., Pollentier, I., Ronse, K., Felten, F., Wong, E. and England, Jonathan (2001) Impact of 193nm Resist Shrinkage on CD-SEM Metrology In: Interface 2001 Conference, 2001.

Full text not available from this repository.
Item Type: Conference or Workshop Item (Conference Paper)
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering
Authors :
Hoffmann, T.
Storms, G.
Ercken, M.
Maenhoudt, M.
Pollentier, I.
Ronse, K.
Felten, F.
Wong, E.
Date : 2001
Depositing User : Clive Harris
Date Deposited : 09 Jun 2017 13:49
Last Modified : 16 Jan 2019 18:53

Actions (login required)

View Item View Item


Downloads per month over past year

Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800