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Techniques for providing a ribbon-shaped gas cluster ion beam

Renau, et al. (2009) Techniques for providing a ribbon-shaped gas cluster ion beam 7,547,900.

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Abstract

Techniques for providing a ribbon-shaped gas cluster ion beam are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for providing a ribbon-shaped gas cluster ion beam. The apparatus may comprise at least one nozzle configured to inject a source gas at a sufficient speed into a low-pressure vacuum space to form gas clusters. The apparatus may also comprise at least one ionizer that causes at least a portion of the gas clusters to be ionized. The apparatus may further comprise a beam-shaping mechanism that forms a ribbon-shaped gas cluster ion beam based on the ionized gas clusters.

Item Type: Patent
Divisions : Faculty of Engineering and Physical Sciences > Electronic Engineering
Authors :
NameEmailORCID
Renau, AnthonyUNSPECIFIEDUNSPECIFIED
Olson, Joseph C.UNSPECIFIEDUNSPECIFIED
England, Jonathanj.england@surrey.ac.ukUNSPECIFIED
Date : 16 June 2009
Identification Number : 7,547,900
Depositing User : Clive Harris
Date Deposited : 26 May 2017 11:30
Last Modified : 26 May 2017 11:30
URI: http://epubs.surrey.ac.uk/id/eprint/841190

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