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Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system

Obradovic, M, Pjevic, D, Perusko, D, Grce, A, Milosavljevic, M, Homewood, KP and Siketic, Z (2015) Effects of helium ion irradiation on bubble formation in AlN/TiN multilayered system THIN SOLID FILMS, 591. pp. 164-168.

Full text not available from this repository.
Item Type: Article
Authors :
NameEmailORCID
Obradovic, MUNSPECIFIEDUNSPECIFIED
Pjevic, DUNSPECIFIEDUNSPECIFIED
Perusko, DUNSPECIFIEDUNSPECIFIED
Grce, AUNSPECIFIEDUNSPECIFIED
Milosavljevic, MUNSPECIFIEDUNSPECIFIED
Homewood, KPk.homewood@surrey.ac.ukUNSPECIFIED
Siketic, ZUNSPECIFIEDUNSPECIFIED
Date : 30 September 2015
Identification Number : https://doi.org/10.1016/j.tsf.2015.03.074
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Materials Science, Coatings & Films, Physics, Applied, Physics, Condensed Matter, Materials Science, Physics, Aluminum nitride, Titanium nitride, Multilayers, Helium, Implantation, Bubble formation, Delamination, RADIATION-DAMAGE, TIN COATINGS, TOLERANCE
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:37
Last Modified : 17 May 2017 15:12
URI: http://epubs.surrey.ac.uk/id/eprint/839880

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