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Synthesis, structure and applications of amorphous diamond

McKenzie, DR, Muller, DA, Kravtchinskaia, E, Segal, D, Cockayne, DJH, Amaratunga, G and Silva, R (1991) Synthesis, structure and applications of amorphous diamond Thin Solid Films, 206 (1-2). pp. 198-203.

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Abstract

The relation was investigated between the compressive stress, the substrate temperature and the microstructure of amorphous carbon films deposited from the plasma stream of a cathodic vacuum arc with a curved magnetic filter. A pressure-temperature phase diagram is presented in which the results of a number of depositions at various substrate bias levels and temperatures are plotted. The microstructure of each film was determined by electron energy loss spectroscopy and electron diffraction.

Item Type: Article
Authors :
NameEmailORCID
McKenzie, DRUNSPECIFIEDUNSPECIFIED
Muller, DAUNSPECIFIEDUNSPECIFIED
Kravtchinskaia, EUNSPECIFIEDUNSPECIFIED
Segal, DUNSPECIFIEDUNSPECIFIED
Cockayne, DJHUNSPECIFIEDUNSPECIFIED
Amaratunga, GUNSPECIFIEDUNSPECIFIED
Silva, RUNSPECIFIEDUNSPECIFIED
Date : 10 December 1991
Identification Number : 10.1016/0040-6090(91)90421-S
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:35
Last Modified : 17 May 2017 13:35
URI: http://epubs.surrey.ac.uk/id/eprint/839784

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