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Synthesis, structure and applications of amorphous diamond

McKenzie, DR, Muller, DA, Kravtchinskaia, E, Segal, D, Cockayne, DJH, Amaratunga, G and Silva, R (1991) Synthesis, structure and applications of amorphous diamond Thin Solid Films, 206 (1-2). pp. 198-203.

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The relation was investigated between the compressive stress, the substrate temperature and the microstructure of amorphous carbon films deposited from the plasma stream of a cathodic vacuum arc with a curved magnetic filter. A pressure-temperature phase diagram is presented in which the results of a number of depositions at various substrate bias levels and temperatures are plotted. The microstructure of each film was determined by electron energy loss spectroscopy and electron diffraction.

Item Type: Article
Authors :
McKenzie, DR
Muller, DA
Kravtchinskaia, E
Segal, D
Cockayne, DJH
Amaratunga, G
Silva, R
Date : 10 December 1991
DOI : 10.1016/0040-6090(91)90421-S
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:35
Last Modified : 17 May 2017 13:35

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