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Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si

Pawlak, BJ, Cowern, NEB, Ahn, C, Vandervorst, W, Gwilliam, R and van Berkum, JGM (2014) Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si APPLIED PHYSICS LETTERS, 105 (22), ARTN 22160.

Full text not available from this repository.
Item Type: Article
Authors :
NameEmailORCID
Pawlak, BJUNSPECIFIEDUNSPECIFIED
Cowern, NEBUNSPECIFIEDUNSPECIFIED
Ahn, CUNSPECIFIEDUNSPECIFIED
Vandervorst, WUNSPECIFIEDUNSPECIFIED
Gwilliam, Rr.gwilliam@surrey.ac.ukUNSPECIFIED
van Berkum, JGMUNSPECIFIEDUNSPECIFIED
Date : 1 December 2014
Identification Number : 10.1063/1.4902972
Uncontrolled Keywords : Science & Technology, Physical Sciences, Physics, Applied, Physics, INTERSTITIAL CLUSTERS, ROOM-TEMPERATURE, SILICON, IMPLANTATION, DISSOLUTION, ACTIVATION, MECHANISMS
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:32
Last Modified : 17 May 2017 15:11
URI: http://epubs.surrey.ac.uk/id/eprint/839587

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