Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si

Pawlak, BJ, Cowern, NEB, Ahn, C, Vandervorst, W, Gwilliam, R and van Berkum, JGM (2014) Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si APPLIED PHYSICS LETTERS, 105 (22), ARTN 22160.

Full text not available from this repository.

Item Type:	Article
Authors :	Name Email ORCID Pawlak, BJ UNSPECIFIED UNSPECIFIED Cowern, NEB UNSPECIFIED UNSPECIFIED Ahn, C UNSPECIFIED UNSPECIFIED Vandervorst, W UNSPECIFIED UNSPECIFIED Gwilliam, R r.gwilliam@surrey.ac.uk UNSPECIFIED van Berkum, JGM UNSPECIFIED UNSPECIFIED
Date :	1 December 2014
Identification Number :	https://doi.org/10.1063/1.4902972
Uncontrolled Keywords :	Science & Technology, Physical Sciences, Physics, Applied, Physics, INTERSTITIAL CLUSTERS, ROOM-TEMPERATURE, SILICON, IMPLANTATION, DISSOLUTION, ACTIVATION, MECHANISMS
Related URLs :	Author
Depositing User :	Symplectic Elements
Date Deposited :	17 May 2017 13:32
Last Modified :	17 May 2017 15:11
URI:	http://epubs.surrey.ac.uk/id/eprint/839587

Actions (login required)

View Item

Downloads