Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si
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Pawlak, BJ, Cowern, NEB, Ahn, C, Vandervorst, W, Gwilliam, R and van Berkum, JGM (2014) Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si APPLIED PHYSICS LETTERS, 105 (22), ARTN 22160.
Full text not available from this repository.| Item Type: | Article | |||||||||||||||||||||
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| Date : | 1 December 2014 | |||||||||||||||||||||
| Identification Number : | 10.1063/1.4902972 | |||||||||||||||||||||
| Uncontrolled Keywords : | Science & Technology, Physical Sciences, Physics, Applied, Physics, INTERSTITIAL CLUSTERS, ROOM-TEMPERATURE, SILICON, IMPLANTATION, DISSOLUTION, ACTIVATION, MECHANISMS | |||||||||||||||||||||
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| Depositing User : | Symplectic Elements | |||||||||||||||||||||
| Date Deposited : | 17 May 2017 13:32 | |||||||||||||||||||||
| Last Modified : | 17 May 2017 15:11 | |||||||||||||||||||||
| URI: | http://epubs.surrey.ac.uk/id/eprint/839587 |
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