University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Chemoresistive gas sensor manufacturing using mixed technologies

Moldovan, C, Sosin, S, Nedelcu, O, Kaufmann, U, Ritzhaupt-Kleissl, HJ, Dimov, S, Petkov, P, Dorey, R, Persson, K, Gomez, D and Johander, P (2005) Chemoresistive gas sensor manufacturing using mixed technologies Proceedings of the International Semiconductor Conference, CAS, 1. pp. 201-204.

Full text not available from this repository.

Abstract

The paper presents the development of a novel suspended membrane resistive gas sensor on a ceramic substrate. The sensor is designed and simulated to be fabricated by combining laser milling techniques, conductive ceramic technology, thin film technology, and semiconductor metal oxides. Trenches are created in the alumina substrate in order to define the geometry of the heater using laser processing of the substrate. The heater is completed by filling the trenches with conductive ceramic paste and then baking to remove the solvent from the paste. The next step consists of polishing the surface to obtain a surface roughness small enough for thin film technology. A dielectric (SiO 2 or ceramic) material is then deposited, acting as hot plate and also as electrical isolation between the heater and sensing electrode. The sensing electrode consists of an interdigitated resistor made of Au or Pt with thickness in the range of 2000 -3000 Å. The gas sensitive layer (SnO 2) is deposited by screen printing or spinning. When heated it react with gas molecules and changes its resistivity, thereby acting as a sensor. The final step involves releasing the sensor, enabling it to be suspended on four bridges, to minimise the dissipation of the heat in the substrate. © 2005 IEEE.

Item Type: Article
Authors :
NameEmailORCID
Moldovan, CUNSPECIFIEDUNSPECIFIED
Sosin, SUNSPECIFIEDUNSPECIFIED
Nedelcu, OUNSPECIFIEDUNSPECIFIED
Kaufmann, UUNSPECIFIEDUNSPECIFIED
Ritzhaupt-Kleissl, HJUNSPECIFIEDUNSPECIFIED
Dimov, SUNSPECIFIEDUNSPECIFIED
Petkov, PUNSPECIFIEDUNSPECIFIED
Dorey, Rr.dorey@surrey.ac.ukUNSPECIFIED
Persson, KUNSPECIFIEDUNSPECIFIED
Gomez, DUNSPECIFIEDUNSPECIFIED
Johander, PUNSPECIFIEDUNSPECIFIED
Date : 1 December 2005
Identification Number : https://doi.org/10.1109/SMICND.2005.1558747
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:12
Last Modified : 17 May 2017 15:09
URI: http://epubs.surrey.ac.uk/id/eprint/838328

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year


Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800