Fabrication and characterisation of annular thickness mode piezoelectric micro ultrasonic transducers

Dorey, RA, Dauchy, F, Wang, D and Berriet, R (2007) Fabrication and characterisation of annular thickness mode piezoelectric micro ultrasonic transducers IEEE International Symposium on Applications of Ferroelectrics. pp. 732-733.

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Abstract

Micromachining techniques, in combination with low temperature ceramic composite sol gel processing, have been used to fabricate annular array thickness-mode piezoelectric micro ultrasonic transducers (Tm-pMUT). The processing techniques of low temperature (720°C) composite sol gel ceramic (sol + ceramic powder) deposition and wet etching will be described and device architectures demonstrated. Using these techniques, high quality PZT materials with near bulk permittivity have been obtained. The Tm-pMUT device resonated in the range of 50-100MHz with a kt of between 0.3 and 0.4 depending on processing conditions. Examples of devices will be presented along with results of electrical and resonance measurements.

Item Type:	Article
Authors :	Name Email ORCID Dorey, RA r.dorey@surrey.ac.uk Dauchy, F Wang, D Berriet, R
Date :	1 December 2007
DOI :	10.1109/ISAF.2007.4393385
Depositing User :	Symplectic Elements
Date Deposited :	17 May 2017 13:12
Last Modified :	19 Jun 2018 06:12
URI:	http://epubs.surrey.ac.uk/id/eprint/838325

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