Fabrication and characterisation of annular thickness mode piezoelectric micro ultrasonic transducers
Dorey, RA, Dauchy, F, Wang, D and Berriet, R (2007) Fabrication and characterisation of annular thickness mode piezoelectric micro ultrasonic transducers IEEE International Symposium on Applications of Ferroelectrics. pp. 732-733.
Full text not available from this repository.Abstract
Micromachining techniques, in combination with low temperature ceramic composite sol gel processing, have been used to fabricate annular array thickness-mode piezoelectric micro ultrasonic transducers (Tm-pMUT). The processing techniques of low temperature (720°C) composite sol gel ceramic (sol + ceramic powder) deposition and wet etching will be described and device architectures demonstrated. Using these techniques, high quality PZT materials with near bulk permittivity have been obtained. The Tm-pMUT device resonated in the range of 50-100MHz with a kt of between 0.3 and 0.4 depending on processing conditions. Examples of devices will be presented along with results of electrical and resonance measurements.
Item Type: | Article | |||||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Divisions : | Surrey research (other units) | |||||||||||||||
Authors : |
|
|||||||||||||||
Date : | 1 December 2007 | |||||||||||||||
DOI : | 10.1109/ISAF.2007.4393385 | |||||||||||||||
Depositing User : | Symplectic Elements | |||||||||||||||
Date Deposited : | 17 May 2017 13:12 | |||||||||||||||
Last Modified : | 24 Jan 2020 23:36 | |||||||||||||||
URI: | http://epubs.surrey.ac.uk/id/eprint/838325 |
Actions (login required)
![]() |
View Item |
Downloads
Downloads per month over past year