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Challenges in integration of piezoelectric ceramics in micro electromechanical systems

Dorey, RA (2009) Challenges in integration of piezoelectric ceramics in micro electromechanical systems Materials Science Forum, 606. pp. 43-50.

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Abstract

Lead zirconate titanate (PZT) thick films, a few tens of micrometres thick, are of technological interest for integration with microsystems to create micro electromechanical systems (MEMS) with high sensitivity and power output. This paper examines the challenges faced in integrating thick film PZT with other materials to create functional micro devices. Thermal, chemical and mechanical challenges associated with integration will be examined and potential solutions explored. © (2009) Trans Tech Publications, Switzerland.

Item Type: Article
Authors :
NameEmailORCID
Dorey, RAr.dorey@surrey.ac.ukUNSPECIFIED
Date : 1 January 2009
Identification Number : https://doi.org/10.4028/0-87849-350-6.43
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:12
Last Modified : 17 May 2017 15:09
URI: http://epubs.surrey.ac.uk/id/eprint/838323

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