University of Surrey

Test tubes in the lab Research in the ATI Dance Research

Formation of PZT thick film single elements using EHDA deposition

Wang, DZ and Dorey, RA (2009) Formation of PZT thick film single elements using EHDA deposition Materials Science Forum, 628 62. pp. 405-410.

Full text not available from this repository.

Abstract

In this paper, electrohydrodynamic atomization combined with a polymeric micromoulding technique was used to form PZT single element devices using a PZT sol-gel slurry without an etching process. The PZT single element device was initially designed to work as a piezoelectric ultrasonic transducer consisting of a circular or a square of various sizes, which was produced and used to evaluate the process. The resulting PZT device had a homogenous microstructure. It was observed that the relative permittivity of the circular and square single element devices was especially high at small size due to the fringe effect. The results show that the radius and width of the PZT single circular and square element devices with a thickness of 15μm should be bigger than 400μm in order to reduce the fringe effect. © (2009) Trans Tech Publications, Switzerland.

Item Type: Article
Authors :
NameEmailORCID
Wang, DZUNSPECIFIEDUNSPECIFIED
Dorey, RAr.dorey@surrey.ac.ukUNSPECIFIED
Date : 20 November 2009
Identification Number : https://doi.org/10.4028/www.scientific.net/MSF.628-629.405
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:12
Last Modified : 17 May 2017 15:09
URI: http://epubs.surrey.ac.uk/id/eprint/838321

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year


Information about this web site

© The University of Surrey, Guildford, Surrey, GU2 7XH, United Kingdom.
+44 (0)1483 300800