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Stable TiO2/Pt electrode structure for lead containing ferroelectric thick films on silicon MEMS structures

Duval, FFC, Dorey, RA, Haigh, RH and Whatmore, RW (2003) Stable TiO2/Pt electrode structure for lead containing ferroelectric thick films on silicon MEMS structures THIN SOLID FILMS, 444 (1-2). pp. 235-240.

Full text not available from this repository.
Item Type: Article
Authors :
NameEmailORCID
Duval, FFCUNSPECIFIEDUNSPECIFIED
Dorey, RAr.dorey@surrey.ac.ukUNSPECIFIED
Haigh, RHUNSPECIFIEDUNSPECIFIED
Whatmore, RWUNSPECIFIEDUNSPECIFIED
Date : 1 November 2003
Identification Number : 10.1016/S0040-6090(03)01129-5
Uncontrolled Keywords : Science & Technology, Technology, Physical Sciences, Materials Science, Multidisciplinary, Materials Science, Coatings & Films, Physics, Applied, Physics, Condensed Matter, Materials Science, Physics, MATERIALS SCIENCE, COATINGS & FILMS, MATERIALS SCIENCE, MULTIDISCIPLINARY, PHYSICS, APPLIED, PHYSICS, CONDENSED MATTER, PZT, platinum, silicon, interface, BARRIER, LAYERS
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:12
Last Modified : 17 May 2017 15:09
URI: http://epubs.surrey.ac.uk/id/eprint/838318

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