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Electroceramic thick film fabrication for MEMS

Dorey, RA and Whatmore, RW (2004) Electroceramic thick film fabrication for MEMS JOURNAL OF ELECTROCERAMICS, 12 (1-2). pp. 19-32.

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Item Type: Article
Authors :
NameEmailORCID
Dorey, RAr.dorey@surrey.ac.ukUNSPECIFIED
Whatmore, RWUNSPECIFIEDUNSPECIFIED
Date : 1 January 2004
Identification Number : 10.1023/B:JECR.0000033999.74149.a3
Uncontrolled Keywords : Science & Technology, Technology, Materials Science, Ceramics, Materials Science, MATERIALS SCIENCE, CERAMICS, thick films, electroceramics, MEMS, PZT, DIRECT-WRITE FABRICATION, ELECTROPHORETIC DEPOSITION, PIEZOELECTRIC PROPERTIES, RIGID SUBSTRATE, PZT CERAMICS, SILICON, COMPOSITE, COEFFICIENT, COATINGS, BEHAVIOR
Related URLs :
Depositing User : Symplectic Elements
Date Deposited : 17 May 2017 13:12
Last Modified : 17 May 2017 15:09
URI: http://epubs.surrey.ac.uk/id/eprint/838314

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